New Raith EBL system installation week 14
Published Mar 09, 2018
Albanova Nanolab will move to the cutting edge of electron beam lithography with the Raith Voyager system
Subject to acceptance testing at Raith in Dortmund, Germany March 21-22 by a party of expert users from the Nanolab, the new Voyager EBL system will be installed week 14 (the week after Easter). With dismantling time for the current Raith 150, the lab will be without e-beam lithography for about two weeks.
The new system represents the latest technology in EBL, with major improvements in speed and automation. It should allow users to more easily and accurately reproduce designs with less need to account for instrumental variations.