Nanofabrication, SK3760

Introduction

The Albanova Nano-Fab-Lab is a joint nano- and micro- fabrication facility used by many academic groups in Stockholm, at Albanova, KTH, KTH Kista and SU, as well as some commercial activities. The laboratory offers nano- and micro- scale fabrication techniques, imaging and metrology, and has a broad user spectrum; which means that several processes in different substrates and for different applications run in parallel.

This course is designed for Nano-Lab graduate students, researchers, and master students that are already users or want to become users of the Albanova Nano-Lab. It is also suitable for students that work in the Electrum lab. During the course we will discuss the different clean room processes and instrumentation putting emphasis on the critical parameters and their optimization.

The course will not grant driving licenses for advanced instruments (i.e, AFM, E-beam lithography, FIB-SEM, depositioning systems, etching systems), but can be considered as a first step towards a license.

Note that lab usage fees are to be covered separately.

Goals

After the course you should be able to apply your knowledge in clean room instrumentation to different clean room processes and to be able to collaborate with other users in such a way that both parties can benefit from it. This means you should be able to:

• Describe and explain how the instrumentation of the NanoFabLab works and how it can be used.
• Design the different steps for a specific process and choose the appropriate parameters for each step.
• Identify the most appropriate instrument that will let you evaluate each step of a given process.
• Document the different processes in such a way that other users can benefit from it.

Participants

The course is addressed to students/users/future users of the Albanova Nano-Fab-Lab.  Each participant should have his/her own project. It is mandatory to attend all the lectures and actively participate in the lab work. It requires dedication.

Pre-requisites

Some experience of working in a lab, not necessarily a cleanroom. Good general science or technical education in Physics, Chemistry, Bio-physics etc. Advanced level courses are not necessary to understand the basic ideas. A good sense for physical apparatus and computer interfaces are needed to properly use the rather complex systems in the Nano Fab Lab.

Course literature

Handouts distributed via the course web-site.

Schedule

April 15 10h-12h	Course presentation What is a clean room?
April 16 10h-12h	Lithography I: Photolithography
April 19 10h-12h	Lithography II: E-beam lithography
April 22 10h-12h	Wet and dry etching
April 23 10h-12h	Focus Ion beam
April 24 10h-12h	Evaporation and sputtering
April 25 10h-12h	SEM/ EDX
April 26 10h-12h	Optical micrsocopy Profiler
May 6 10h-12h	Processes and group projects
May 7 10h-12h	The cleanroom at Electrum; ALD
May 8 10h-12h	AFM
May 21  10h-12h	Presentation of Group project I
June 4    10h-12h	Presentation of Group project II
June 18  10h-12h	Individual project presentation

Course Contents

The course is divided in two parts: the first part consists of seminars in which we discuss the different instruments and their parameters; the second part involves lab work and meetings to discuss its progress.

Part I. Seminars

All seminars are 2 h-long.

Seminar 1: Course presentation; What is a clean room?

BLOCK I: Fabrication

Seminar 2:Lithography I: Resists, hotplates and ovens. Photolithography

Seminar 3: Lithography II: E-beam lithography
Seminar 4: Etching. Wet and dry etching.

Seminar 5: Evaporation and Sputtering

Seminar 6: Focus Ion beam

BLOCK II: Evaluation Instruments

Seminar 7: Surface profiler and Atomic layer deposition

Seminar 8: Optical Microscopy

Seminar 9: AFM

Seminar 10: SEM

Part II. Lab work and discussions

Seminar 11: Processes and group projects

Seminar 12: Presentation of the Group Project I

Seminar 13: Presentation of the Group Project II

Seminar 14: Individual project presentation

Examination

In order pass the course, each participant must:

• Attend all the seminars and meetings
• Carry out the two different group projects.
• Present the two group projects and his/her own project in such a way that the rest of the participants can follow and understand your process problems and solutions.
• Hand in a written report about the lab-projects following the guidelines below.

How will we work?

You will work on your own clean room process, but also with other participants’ projects.

1 week before Seminar 11:

- Hand in your project proposal. Specify the questions you would like to work on. The project should be easily divided into two sub-projects.

We will divide each project in two parts. You will be placed in a group of two persons (“group project I”). In this group, you will work with two sub-projects: the first part of your own project and the first part of your co-worker’s project.

Each “group project I” will present their work during Seminar 12. You will present your co-worker “part” and he/she will present your part. You will have 10 min/group. In your presentation you need to cover the following points:

• What have you done? Which solutions did you try out?
• Which problems did you have? How did you solve them?
• Lessons learned
• Which problems do you still have?

During seminar 12 you will be required to give feedback to your colleagues.

After seminar 12, you will be placed in another group of two persons (“group project II”). In this group, you will work with two sub-projects: the second part of your own project and the second part of your co-worker’s project. You will have 3 weeks to work with both sub-projects.

Each “group project II” will present their work during Seminar 13. Seminar 13 will have the same format as Seminar 12.

Seminar 14

You present your own project (5 min max). In this presentation you should explain the overall project but put special emphasis on what you have done after seminar 12 and 13.

The project report should be handed after Seminar 14. It should include:

• A description of each individual process in your own project step-by-step. Motivation for all the chosen parameters. Show any dose test etc.
• All “unsuccessful” steps. Explain why they were not successful.
• Include a lessons learned section concerning the technical work.
• Include a lessons-learned section on your group work. (Both for group I and Group II)

Note that both lessons learned sections should be readable to someone that wants to use one of your steps but not necessarily the whole process.

See the following diagram for further clarification:

Registration and fees

For all the students that do not belong to the Applied Physics department there will be a course fee of 6500 SEK. (This fee does not include lab costs).

Note that lab and instruments fees are to be covered separately.

Registration

Registration deadline: March 1, 2013

Please, register by sending an e-mail to Carlota Canalias.

Carlota: cc@laserphysics.kth.se