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Nanofabrication with focused ion and electron beams SK3750

This course is given on an as-needed basis, typically spring term, every other year.

link to password protected page

Schedule for 2020 run of course:

All 5 lectures will be in Applied physics seminar room A2:1041, Albanova, Roslagstullsbacken 21. 

  1. Monday Feb. 3, 13:00 -15:00, Lecture, David Haviland - Electron Beam lithography basics
  2. Tuesday Feb. 4, 13:00 -17:00, Lab Demo, Anders Liljeborg and Erik Holmgren - EBL demo in lab.
  3. Wednesday Feb. 5, 13:00 -15:00, Lecture, Andreas Rhyd - Focused Ion Beam and SEM basics.
  4. Thursday Feb. 6, 13:00 - 15:00. Lab Demo, Adrian Iovan - SEM and FIB with manipulator.
  5. Friday Feb. 7, 13:00 - 15:00. David Haviland, Erik Holmgren, Adrian Iovan - Students present project plan, discussion, training groups.

Course Description:

The course is designed for Masters, PhD students and researchers who will use the Electron Beam Lithography (EBL) system, Scanning Electron Microscope (SEM) or Focused Ion Beam (FIB) system in the Albanova Nanolab. The course consists of 2 x 2 hours introductory lectures with theory, 2 x 2 hours of demonstration in the Nanolab, and 1 x 2 hours where students present and discuss their project ideas.

The lectures cover the basic principles of EBL, SEM and FIB. The demonstrations give an overview of the specific machines which we have in the Albanova NanoLab. At the final meeting students will make short presentations of their ideas for a nanofabrication project with EBL and FIB. The presentations lead in to a discussion of how best to make the structure and what techniques are best to learn in additional training sessions.

Those students who wish to become users will attend all the lectures and take more extended training in order to get a licence to use the EBL and SEM/FIB systems. Training to get a licence is a commitment in time and money and it requires that you are a paying member of the Nanolab. Taking this course is not sufficient to get a licence, but it is an excellent starting point. If you already have had initial training and have a licence to use the EBL or SEM/FIB system, we ask that you also take this course to gain a broader overview of the methods and to refresh your skills and understanding.

In this course we will focus on the beam exposure part of nanofabrication, and not on any subsequent metalization, etching, or prior material growth. Development of any special substrate material, or the development of a special etching processes required for the students project are not within the scope of this course. For EBL, the NanoLab has a few standard resists and the necesary developers to do high resolution work.


Satisfactory completion of the course requires that you:

  • Attend all the lectures
  • For students training to become users:
    • Attend the training sessions and learn to use the system.
    • Successfully write your pattern and examine it in the SEM mode, taking pictures.
    • Prepare a short report describing your project. The report should be about 5 pages total. It should include a short introduction and motivation for your project. You should describe your process and include "recipe" information about the resist, the exposure parameters, etc. You should include SEM pictures of your results. Include a discussion of problems encountered. Especially important is to document information about new techniques and recipes which may be useful to future users. The report should be turned in PDF format so that it is suitable for posting in the Nanolab web-based process archive.


Good general science or technical education. Advanced level courses are not necessary to understand the basic ideas. A good sense for physical apparatus and computer interfaces are needed to properly use these rather complex systems. Access to the Albanova Nanolab requires that your reserach project pay user fees.

Course Literature:

Lecture notes and material will be made available to students taking the course through the link below.

link to password protected page


If you are interested in this course please contact Prof. David Haviland . Include in your e-mail message:

  • Your name, address, phone, and e-mail.
  • The name of your research advisor who will pay the nanolab fee.
  • Your department, Section, School and University.
  • A couple of sentences describing why you want to take the course.
Page responsible:David B Haviland
Belongs to: Nanostructure Physics
Last changed: Feb 03, 2020