New e-beam system ordered
Published Oct 31, 2017
An order for a new Raith Voyager e-beam system has finally been placed
After 5M SEK funding was secured from the KTH Board and smaller investments from interested user groups, an order was placed on October 13th for a newelectron beam lithography system. The new state-of-the-art tool replaces the work-horse Raith 150, and will ensure major increases in speed, automation, throughput and reproducibility. Installation is projected to take place July 2018.