Standard metrology and imaging tools for micro- and nanofabrication and material characterization.
Atomic force microscopy (AFM), one of the cornerstones of nanoscience and technology, is a highly versatile technique for imaging and force measurement in air or liquid, and in controlled environments.
Scanning Electron Microscopy (SEM) is the imaging workhorse of the Nanolab, for rapid characterization of micro- and nanostructures
Stylus and Optical Profilometry
Stylus profilometry provides reliable step height data for determining film thickness down to nm level. Optical profilometry provides rapid 3D images of topography at mm lateral scales.
Several high performance optical microscopes are available. Refer to the
general lab info
page for details.